1. Materials, Fabrication, Packaging and Simulation Technologies
1.1 Materials for MEMS/NEMS
1.2 Generic MEMS/NEMS Manufacturing Techniques
1.3 Packaging and Assembly
1.4 Modeling, Simulation and Signal Processing of MEMS/NEMS
2. Micro/Nanofluidics and Lab-on-a-Chip
2.1 Physics and Chemistry of Micro/Nanofluidics
2.2 Modeling/Computational Simulation of Micro/Nanofluidics
2.3 Materials and Devices for Micro/Nanofluidics
2.4 Lab on a Chip and Micro/Nano Total Analysis Systems (μTAS, nTAS)
2.5 Organ/Tissue on a Chip/Tissue on a chip
3. Bio/Medical Micro/Nano Devices
3.1 Materials and Manufacturing for Bio/Medical Devices
3.2 Nanobiotechnology
3.3 Biochemical Sensors and Bioreactors
3.4 Medical Microsystems (i.e., Implantables, minimal invasives, probes)
4. Physical and Mechanical Micro/Nano Sensors and Microsystems
4.1 Materials for Physical and Mechanical Sensors
4.2 Mechanisms for Physical and Mechanical Sensing
4.3 Manufacturing for Physical and Mechanical Microsystems
4.4 Nanoscale Physical and Mechanical Sensors
5. Chemical and Environmental Micro/Nano Sensors and Microsystems
5.1 Materials for Chemical and Environmental Sensors
5.2 Mechanisms for Chemical and Environmental Sensing
5.3 Manufacturing for Chemical and Environmental Microsystems
5.4 Platforms for Environmental Sensing
6. RF/Optical Micro/Nano Devices
6.1 RF and THz MEMS Devices and Systems
6.2 Photonic Devices and Systems
6.3 Free Space Optical Devices and Systems
7. Micro/Nano Energy and Power Devices
7.1 Materials and Manufacturing for Micro/Nano Energy and Power Devices
7.2 Energy Harvesting Micro/Nano Devices
7.3 Micro/Nano Energy and Power Devices and Systems
8. Soft, Flexible and Printed Devices
8.1 Soft Electronic Devices
8.2 Soft Analytical Devices
8.3 3D Printed Electronic Devices and Printing Technology
9. MEMS/NEMS Applications and Commercialization
9.1 New Applications of MEMS/NEMS Devices
9.2 New Commercialization of MEMS/NEMS Devices
9.3 New Systems driven by MEMS/NEMS Devices
9.4 Mass Production Technology for MEMS Products